Large Sample Compartment

The SolidSpec-3700/3700DUV have large sample compartments which allow large samples to be measured without sample destruction. Its internal dimensions are 900W x 700D x 350H mm.
A sample maximum of 700W x 560D x 40H mm can be set in the sample
compartment and an entire sample area of 12 inches or 310 x 310 mm sample is
measurable by mounting the Automatic X-Y stage (option).
The vertical optical path makes it possible to perform transmission or reflection measurements of large samples keeping them horizontal.
 

Large Sample Compartment with Automatic X-Y Stagesolid0401

 
 

 

 

12 inch Silicon Wafer on Automatic X-Y Stagesolid0402

 

 

 

 

 

 

 

 

Automatic Measurement

The Automatic X-Y stage developed for the SolidSpec-3700/3700DUV enables
automatic measurements for the points specified in advance while maintaining
the nitrogen gas purge.
Reflection spectra of SiO2 film on 12-inch silicon wafersolid0403
 
 
 
 
 
 
 
Thickness of SiO2 film on 12-inch silicon wafersolid0404
 

 

 

 

 

 

 

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NEWS / EVENT

For Research Use Only. Not for use in diagnostic procedures.

This page may contain references to products that are not available in your country. Please contact us to check the availability of these products in your country.